Special Section on the Interface of Holography and MEMS

Optically addressed deformable mirror for low-light applications

[+] Author Affiliations
Jed Khoury, Jarrett Vella

AFRL/RY, Sensors Directorate, 2241 Avionics Circle, Building 600, Wright Patterson Air Force Base, Dayton, Ohio 45433-7318, United States

J. Micro/Nanolith. MEMS MOEMS. 14(4), 041312 (Oct 06, 2015). doi:10.1117/1.JMM.14.4.041312
History: Received May 26, 2015; Accepted August 27, 2015
Text Size: A A A

Abstract.  A microelectromechanical deformable mirror device that is optically addressed and designed to actuate at extremely low-light levels for wavefront error correction is fabricated and theoretically described. The device consists of an optically transparent substrate, a photoconductive detector, a thin-film resistor, and insulating posts that support a mirror. The mirror is suspended over the detector by the insulating posts and is deformed when the detector is illuminated through the substrate. The actuation of the device is theoretically modeled as a capacitor in series with a photoconductor under an external dc bias. Under an external 6.3 V dc bias and when back-illuminated with 501μW/cm2 light at 539 nm, a total mirror deformation of 474.3 nm was obtained and substantiated by numerical modeling. This represents the highest actuation sensitivity to date that results in mirror deflection values in hundreds of nanometers.

Figures in this Article
© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Jed Khoury and Jarrett Vella
"Optically addressed deformable mirror for low-light applications", J. Micro/Nanolith. MEMS MOEMS. 14(4), 041312 (Oct 06, 2015). ; http://dx.doi.org/10.1117/1.JMM.14.4.041312


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.