We have developed organometallic carboxylate compounds  capable of acting as negative-tone extreme ultraviolet (EUV) resists. The most sensitive of these resists contain antimony, three R-groups and two carboxylate groups, and carboxylate groups with polymerizable olefins (e.g., acrylate, methacrylate, or styrenecarboxylate). Evidence suggests that high sensitivity is achieved through the polymerization of olefins in the exposed region. We have performed a systematic sensitivity study of the molecules of the type where we have studied seven R groups, four main group metals (M), and three polymerizable carboxylate groups (). The sensitivity of these resists was evaluated using or dose to maximum resist thickness after exposure and development. We found that the greatest predictor of sensitivity of the resists is their level of polymerizable olefins. We mathematically define the polymerizable olefin loading (POL) as the ratio of the number of olefins versus the number of nonhydrogen atoms. Linear and log plots of versus POL for a variety of molecules of the type lend insight into the behavior of these resists.