Microfabrication

Interference ablation of nanogratings with different duty cycles on gold films

[+] Author Affiliations
Tianrui Zhai, Xiaofeng Wu, Yonglu Wang, Xinping Zhang

Beijing University of Technology, Institute of Information Photonics Technology and College of Applied Sciences, 100 Ping Le Yuan, Chao Yang District, Beijing 100124, China

J. Micro/Nanolith. MEMS MOEMS. 15(1), 014501 (Jan 05, 2016). doi:10.1117/1.JMM.15.1.014501
History: Received October 15, 2015; Accepted December 4, 2015
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Abstract.  Nanogratings with different duty cycles are directly written on gold films using interference ablation. After exposing the gold film to the interference pattern of ultraviolet laser beams, gold film in the bright fringes will be melted and ablated, whereas much weaker ablation occurs in the dark fringes. The duty cycle of gold nanogratings can be controlled by adjusting the pulse energy and the exposure times, which can be explained by the temperature rise and cumulative effect of the laser–metal interactions. These results introduce additional parameters for the fine fabrication of metal nanogratings based on interference ablation at a large scale and low cost.

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© 2016 Society of Photo-Optical Instrumentation Engineers

Topics

Gold ; Lasers

Citation

Tianrui Zhai ; Xiaofeng Wu ; Yonglu Wang and Xinping Zhang
"Interference ablation of nanogratings with different duty cycles on gold films", J. Micro/Nanolith. MEMS MOEMS. 15(1), 014501 (Jan 05, 2016). ; http://dx.doi.org/10.1117/1.JMM.15.1.014501


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