Microelectromechanical Systems (MEMS)

Fabrication and characterization of a microaccelerometer based on resonant-tunneling diodes

[+] Author Affiliations
Mengwei Li, Kang Du, WeiHang Chu, Jun Liu

North University of China, Key Laboratory of Instrument Science and Dynamic Measurement, Ministry of Education, Taiyuan, Shanxi 030051, China

Tao Deng

Beijing Jiaotong University, School of Electronic and Information Engineering, Beijing 100044, China

Tsinghua University, Institute of Microelectronics, Beijing 100044, China

Houjin Chen

Beijing Jiaotong University, School of Electronic and Information Engineering, Beijing 100044, China

Zewen Liu

Tsinghua University, Institute of Microelectronics, Beijing 100044, China

J. Micro/Nanolith. MEMS MOEMS. 15(1), 015001 (Jan 19, 2016). doi:10.1117/1.JMM.15.1.015001
History: Received July 17, 2015; Accepted December 21, 2015
Text Size: A A A

Abstract.  A microaccelerometer based on gallium arsenide (GaAs) resonant-tunneling diodes (RTDs) is demonstrated. The input acceleration signal can be transformed into an output electrical signal using the meso-piezoresistive effects of the RTDs located at the root of the detection beams. Finite element simulations were performed to design, analyze, and optimize the structures of the accelerometer. The accelerometer was fabricated using a combination of GaAs IC surface and bulk micromachining techniques. Vibrating tests and shock tests were conducted to investigate the accelerometer characteristics. The experimental results revealed that the sensitivity of the RTD accelerometer was 7.91  mV/g. The noise resolution was 1.264  mg/Hz, and the working frequency was up to 3 kHz.

Figures in this Article
© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Mengwei Li ; Tao Deng ; Kang Du ; WeiHang Chu ; Jun Liu, et al.
"Fabrication and characterization of a microaccelerometer based on resonant-tunneling diodes", J. Micro/Nanolith. MEMS MOEMS. 15(1), 015001 (Jan 19, 2016). ; http://dx.doi.org/10.1117/1.JMM.15.1.015001


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.