Lithography

Importance of surface modification of a microcontact stamp for pattern fidelity of soluble organic semiconductors

[+] Author Affiliations
Hea-Lim Park, Bo-Yeon Lee, Se-Um Kim, Jeng-Hun Suh, Sin-Doo Lee

Seoul National University, School of Electrical Engineering, Kwanak P.O. Box 34, Seoul 151-600, Republic of Korea

Min-Hoi Kim

Hanbat National University, Department of Creative Convergence Engineering S10-420, Yuseong-gu, Daejeon 305-719, Republic of Korea

J. Micro/Nanolith. MEMS MOEMS. 15(1), 013501 (Jan 22, 2016). doi:10.1117/1.JMM.15.1.013501
History: Received September 25, 2015; Accepted December 21, 2015
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Abstract.  We described the effect of the ultraviolet ozone (UVO) treatment of a polydimethylsiloxane (PDMS) stamp on the fidelity of 6,13-bis(triisopropylsilylethynyl) pentacene (TIPS-PEN) patterns produced from a TIPS-PEN/polymer blend by selective contact evaporation (SCE). During the SCE process, the TIPS-PEN in contact with the nanoporous PDMS was absorbed into the PDMS stamp, leaving out the TIPS-PEN patterns, complementary to the PDMS patterns, in the noncontact regions. For the case of the untreated, hydrophobic PDMS surface, the TIPS-PEN patterns developed initially were shrunken and eventually disappeared after 24 h due to the steady absorption of the TIPS-PEN in time. In contrast, for the UVO-treated case, the TIPS-PEN patterns were found to maintain the initial shapes over the period of 24 h since the absorption of the TIPS-PEN was limited by the hydrophilic nature of the UVO-treated PDMS. The modified PDMS surface by the UVO for 30 min yielded the highest fidelity of the TIPS-PEN patterns in both height and width. The patterned TIPS-PEN layer by the SCE was implemented into an organic field-effect transistor to demonstrate the viability of the SCE combined with the UVO treatment for solution-processed organic electronic devices.

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© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Hea-Lim Park ; Bo-Yeon Lee ; Se-Um Kim ; Jeng-Hun Suh ; Min-Hoi Kim, et al.
"Importance of surface modification of a microcontact stamp for pattern fidelity of soluble organic semiconductors", J. Micro/Nanolith. MEMS MOEMS. 15(1), 013501 (Jan 22, 2016). ; http://dx.doi.org/10.1117/1.JMM.15.1.013501


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