Micro-optoelectromechanical Systems (MOEMS)

In-plane monolithic microscanner with two synchronized, self-aligned flat mirrors and compliant springs

[+] Author Affiliations
Alaa Elhady

Ain Shams University, Faculty of Engineering, 1 Elsarayat Street, Abbassia, Cairo 11517, Egypt

Mohamed A. E. Mahmoud, Diaa Khalil

Ain Shams University, Faculty of Engineering, 1 Elsarayat Street, Abbassia, Cairo 11517, Egypt

Si-Ware Systems, SWS, 3 Khalid Ibn Al-Waleed Street, Heliopolis, Cairo 11361, Egypt

J. Micro/Nanolith. MEMS MOEMS. 15(1), 015501 (Mar 29, 2016). doi:10.1117/1.JMM.15.1.015501
History: Received December 14, 2015; Accepted February 29, 2016
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Abstract.  This work proposes an architecture for a wide-angle, self-aligned, in-plane monolithic scanner fabricated using the deep reactive ion etching technology. The fabricated microscanner provides an optical scanning in-plane angle of about 86 deg and operates at the speed of 2.73 kHz. The scanning is achieved using two synchronized, flat mirrors coupled mechanically to allow for wide-angle scanning and connected through a compliant structure to allow the use of a linear comb actuator. This wide-angle, in-plane scanning opens the door for many applications, especially for handheld optical displays.

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© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Alaa Elhady ; Mohamed A. E. Mahmoud and Diaa Khalil
"In-plane monolithic microscanner with two synchronized, self-aligned flat mirrors and compliant springs", J. Micro/Nanolith. MEMS MOEMS. 15(1), 015501 (Mar 29, 2016). ; http://dx.doi.org/10.1117/1.JMM.15.1.015501


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