Microfabrication

Simple integration process of single-layer nanowire gratings for polarization navigation sensor

[+] Author Affiliations
Ran Zhang, Jinkui Chu, Ze Liu, Yinlong Wang

Dalian University of Technology, School of Mechanical Engineering, No. 2 Linggong Road, Ganjingzi District, Dalian 116024, China

J. Micro/Nanolith. MEMS MOEMS. 15(3), 034501 (Jul 08, 2016). doi:10.1117/1.JMM.15.3.034501
History: Received March 13, 2016; Accepted June 15, 2016
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Abstract.  A simple integration process of single-layer nanowire gratings (SLNGs) for polarization navigation sensor is proposed. The adaptive capacity of the nanoimprint process on uneven substrate is realized using compressed air and the flexible mold. The plasma ashing process is used to simplify the conventional SLNGs fabrication process. Based on the work mentioned above, six SLNGs areas with 1.3  mm×1.3  mm and six different directions are successfully integrated into a polarization sensitive structure applied to a polarization navigation sensor. The measurement result of quantum efficiency shows good sensitivity, and the angle of polarization measurement error is <±0.1  deg. The experiment result shows that the proposed process is applicable for the integration of large-area single-layer nanometal patterns.

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© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Ran Zhang ; Jinkui Chu ; Ze Liu and Yinlong Wang
"Simple integration process of single-layer nanowire gratings for polarization navigation sensor", J. Micro/Nanolith. MEMS MOEMS. 15(3), 034501 (Jul 08, 2016). ; http://dx.doi.org/10.1117/1.JMM.15.3.034501


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