Microelectromechanical Systems (MEMS)

Ultraviolet-LIGA-based fabrication and characterization of a nonresonant drive-mode vibratory gyro/accelerometer

[+] Author Affiliations
Payal Verma, Svetlana Nikolaevna Khonina, Nikolay Lvovich Kazanskiy

Samara National Research University, Department of Technical Cybernetics, 34, Moskovskoye Shosse, Samara 443086, Russia

Khamar Zaman Khan

Semiconductor Technology and Applied Research Centre, MEMS Design, Bangalore, Karnataka 560016, India

Ram Gopal

Council of Scientific and Industrial Research-Central Electronics Engineering Research Institute, MEMS and Microsensors Group, Pilani, Rajasthan 333031, India

J. Micro/Nanolith. MEMS MOEMS. 15(3), 035001 (Jul 19, 2016). doi:10.1117/1.JMM.15.3.035001
History: Received April 13, 2016; Accepted June 23, 2016
Text Size: A A A

Abstract.  A dual-purpose nonresonant 2-degrees of freedom (DOF) drive-mode and 1-DOF sense-mode vibratory gyro/accelerometer fabricated using the economical ultraviolet-lithographie-galvanoformung-abformung (UV-LIGA) fabrication process using SU-8 photoresist is reported. The dual-purpose device presented is capable of detecting acceleration at the lower-frequency band and angular rate at the operating frequency band thereby functioning as both accelerometer and gyroscope. This is achieved by designing the structure such that the frequency response of the drive oscillator has two drive resonances with a flat zone between them, while the sense oscillator has one resonance, which is deliberately placed in the flat region between the two drive resonances. For angular rate detection, the device is operated in the flat zone at the sense resonance frequency at which the device is less susceptible to frequency variations due to both environmental variation and fabrication imperfections and hence is said to be operating in robust mode. The steady-state response and discrimination for angular rate and acceleration sensing have been devised using analytical modeling. The fabrication process is optimized to realize a gyro/accelerometer that has a 9-μm-thick nickel structural layer and 4-μm capacitive gaps. The overall miniature device size is 2.0  mm×1.9  mm. The experimental frequency response of the fabricated devices shows drive-mode resonances at 2.85 and 4.96 kHz and sense resonance at 3.85 kHz compared to the respective design values of drive-mode resonance frequencies 2.97 and 4.81 kHz and sense resonance frequency of 4 kHz. To demonstrate the dual-purpose capability of the device, acceleration characterization has been carried out and presented. The fabricated sensor is packaged in a ceramic package and interfaced with a MS3110 differential capacitive read out IC to characterize the acceleration response of the sensor, using an out-of-plane shaker. The bandwidth for acceleration detection is found to be 10 to 100 Hz and the sensitivity of the sensor at 30 Hz is found to be 57  mV/g.

Figures in this Article
© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Payal Verma ; Khamar Zaman Khan ; Svetlana Nikolaevna Khonina ; Nikolay Lvovich Kazanskiy and Ram Gopal
"Ultraviolet-LIGA-based fabrication and characterization of a nonresonant drive-mode vibratory gyro/accelerometer", J. Micro/Nanolith. MEMS MOEMS. 15(3), 035001 (Jul 19, 2016). ; http://dx.doi.org/10.1117/1.JMM.15.3.035001


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.