Microfabrication

Unified fabrication process for complex gratings

[+] Author Affiliations
Chi-Chun Ho, Chia-Heng Lin, Yung-Chun Lee, Yu-Bin Chen

National Cheng Kung University, Department of Mechanical Engineering, No. 1, University Road, Tainan City 70101, Taiwan

Jung-San Chen

National Cheng Kung University, Department of Engineering Science, No. 1, University Road, Tainan City 70101, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 15(3), 034502 (Jul 22, 2016). doi:10.1117/1.JMM.15.3.034502
History: Received May 10, 2016; Accepted July 7, 2016
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Abstract.  A unified fabrication process was developed for four complex gratings. One period of each grating contains multiple pairs of ridges/grooves, and a ridge is usually composed of diversified materials. The process was suitable not only for mass fabrication but also for a large area. Moreover, with only one mold, four gratings could be obtained at once. Two 12×12  mm2 samples were fabricated for demonstration. Profile uniformity of each sample was confirmed with broadband infrared (2.5 to 25  μm) transmittance spectra. A good agreement between measured and modeling results was observed.

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© 2016 Society of Photo-Optical Instrumentation Engineers

Topics

Fabrication

Citation

Chi-Chun Ho ; Jung-San Chen ; Chia-Heng Lin ; Yung-Chun Lee and Yu-Bin Chen
"Unified fabrication process for complex gratings", J. Micro/Nanolith. MEMS MOEMS. 15(3), 034502 (Jul 22, 2016). ; http://dx.doi.org/10.1117/1.JMM.15.3.034502


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