Unified fabrication process for complex gratings

Chi-Chun Ho; Jung-San Chen; Chia-Heng Lin; Yung-Chun Lee; Yu-Bin Chen

doi:10.1117/1.JMM.15.3.034502

22 July 2016 Unified fabrication process for complex gratings

Chi-Chun Ho, Jung-San Chen, Chia-Heng Lin, Yung-Chun Lee, Yu-Bin Chen

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 15, Issue 3, 034502 (July 2016). https://doi.org/10.1117/1.JMM.15.3.034502

Abstract

A unified fabrication process was developed for four complex gratings. One period of each grating contains multiple pairs of ridges/grooves, and a ridge is usually composed of diversified materials. The process was suitable not only for mass fabrication but also for a large area. Moreover, with only one mold, four gratings could be obtained at once. Two 12×12 mm² samples were fabricated for demonstration. Profile uniformity of each sample was confirmed with broadband infrared (2.5 to 25 μm) transmittance spectra. A good agreement between measured and modeling results was observed.

Citation Download Citation

Chi-Chun Ho, Jung-San Chen, Chia-Heng Lin, Yung-Chun Lee, and Yu-Bin Chen "Unified fabrication process for complex gratings," Journal of Micro/Nanolithography, MEMS, and MOEMS 15(3), 034502 (22 July 2016). https://doi.org/10.1117/1.JMM.15.3.034502

Published: 22 July 2016

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