Lithography

Anisotropic shadow effects with various pattern directions in an anamorphic high numerical aperture system

[+] Author Affiliations
In-Seon Kim, Guk-Jin Kim, Hye-Keun Oh

Hanyang University, Department of Applied Physics, Ansan, Gyeonggi 15588, Republic of Korea

Michael Yeung

Fastlitho, San Jose, California 95112, United States

Eytan Barouch

Boston University, Boston, Massachusetts 02215, United States

Seong-Wook Kim

Hanyang University, Department of Applied Mathematics, Ansan, Gyeonggi 15588, Republic of Korea

J. Micro/Nanolith. MEMS MOEMS. 15(3), 033504 (Aug 01, 2016). doi:10.1117/1.JMM.15.3.033504
History: Received March 25, 2016; Accepted July 5, 2016
Text Size: A A A

Abstract.  A high numerical aperture (NA) system with an NA larger than 0.5 is required to make patterns of 1X nm and below, even though extreme ultraviolet lithography uses a 13.5-nm wavelength source. To avoid the reflective efficiency loss and to avoid an increase in the chief ray angle of incident light, use of an anamorphic high-NA system is suggested. The suggested anamorphic NA system has nonisotropic magnification, x-magnification of 4× and y-magnification of 8×, and the mask NA shape is an ellipse due to the nonisotropic magnification distribution. Anamorphic NA systems have a nonconventional shadow effect due to nonisotropic incident angle distribution and magnification. These nonisotropic characteristics lead to the reduction of asymmetric shadow distribution and a reduction of horizontal–vertical bias. As a result, anamorphic NA systems can achieve balanced patterning results regardless of pattern direction and incident direction.

Figures in this Article
© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

In-Seon Kim ; Guk-Jin Kim ; Michael Yeung ; Eytan Barouch ; Seong-Wook Kim, et al.
"Anisotropic shadow effects with various pattern directions in an anamorphic high numerical aperture system", J. Micro/Nanolith. MEMS MOEMS. 15(3), 033504 (Aug 01, 2016). ; http://dx.doi.org/10.1117/1.JMM.15.3.033504


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