Microfabrication

Direct hot embossing of microelements by means of photostructurable polyimide

[+] Author Affiliations
Meriem Akin, Kevin Cromwell, Marc Christopher Wurz, Lutz Rissing, Hans Juergen Maier

Leibniz Universitaet Hannover, Institute of Micro Production Technology, An der Universitaet 2, 30823 Garbsen, Germany

Maher Rezem, Maik Rahlves, Bernhard Roth

Leibniz Universitaet Hannover, Hanover Centre of Optical Technologies, Nienburger Straße 17, 30167 Hanover, Germany

Eduard Reithmeier

Leibniz Universitaet Hannover, Institute of Measurement and Automatic Control, Nienburger Straße 17, 30167 Hanover, Germany

J. Micro/Nanolith. MEMS MOEMS. 15(3), 034506 (Aug 23, 2016). doi:10.1117/1.JMM.15.3.034506
History: Received May 9, 2016; Accepted August 4, 2016
Text Size: A A A

Abstract.  While automatic hot embossing systems are available for large- and small-scale productions of polymeric devices, one of the process challenges remains to be the manufacturing of precise, durable, and yet inexpensive hot embossing stamps. The use of metallic stamps manufactured by electroplating a photoresist pattern or by precision milling and their replication into silicone molds with UV-lithography, electroplating, and molding techniques is state of the art. Yet, there have been few, if any, thriving attempts to directly emboss polymers by means of bare photoresists, and in particular polyimide-based photoresists, without transferring the photoresist patterns into a different stamp material. We conduct a proof-of-concept by developing hot embossing stamps based on photosensitive polyimide. We focus primarily on the reliability of the aforementioned stamps throughout the hot embossing cycle and the fidelity of pattern transfer onto polymeric films for different microstructural patterns.

Figures in this Article
© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Meriem Akin ; Maher Rezem ; Maik Rahlves ; Kevin Cromwell ; Bernhard Roth, et al.
"Direct hot embossing of microelements by means of photostructurable polyimide", J. Micro/Nanolith. MEMS MOEMS. 15(3), 034506 (Aug 23, 2016). ; http://dx.doi.org/10.1117/1.JMM.15.3.034506


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.