Special Section on Alternative Lithographic Technologies V

Virtual fabrication using directed self-assembly for process optimization in a 14-nm dynamic random access memory

[+] Author Affiliations
Mattan Kamon, Mustafa Akbulut, Yiguang Yan, Daniel Faken, Andras Pap, Vasanth Allampalli, Ken Greiner, David Fried

Coventor Inc., 135 Beaver Street, Suite 205, Waltham, Massachusetts 02452, United States

J. Micro/Nanolith. MEMS MOEMS. 15(3), 031605 (Sep 13, 2016). doi:10.1117/1.JMM.15.3.031605
History: Received April 29, 2016; Accepted August 12, 2016
Text Size: A A A

Abstract.  For directed self-assembly (DSA) to be deployed in advanced semiconductor technologies, it must reliably integrate into a full process flow. We present a methodology for using virtual fabrication software, including predictive DSA process models, to develop and analyze the replacement of self-aligned quadruple patterning with Liu–Nealey chemoepitaxy on a 14-nm dynamic random access memory (DRAM) process. To quantify the impact of this module replacement, we investigated a key process yield metric for DRAM, interface area between the capacitor contacts and transistor source/drain. Additionally, we demonstrate virtual fabrication of the DRAM cell’s hexagonally packed capacitors patterned with an array of diblock copolymer cylinders in place of fourfold litho-etch (LE4) patterning.

© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Mattan Kamon ; Mustafa Akbulut ; Yiguang Yan ; Daniel Faken ; Andras Pap, et al.
"Virtual fabrication using directed self-assembly for process optimization in a 14-nm dynamic random access memory", J. Micro/Nanolith. MEMS MOEMS. 15(3), 031605 (Sep 13, 2016). ; http://dx.doi.org/10.1117/1.JMM.15.3.031605


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.