Here, we report on the results of our EUV mask scanning lensless imaging tool (RESCAN) which uses a scanning coherent diffractive imaging (SCDI) method.6 SCDI methods were invented a long time ago but were long considered impractical for experimental use due to the stringent restrictions of early algorithms. Fortunately, recent advances in the phase retrieval algorithms,7–10 such as ptychography, have made SCDI a simple, versatile, and effective technique in applications ranging from hard x-rays to visible light and electrons. It is also used for EUV mask imaging by many groups11–13 and to overcome the resolution limitations of lens-based actinic microscopes.14 SCDI uses scattering data recorded with a pixel detector obtained through scanning a finite illumination (probe) across the sample (object) to be imaged. Each subsequent position is chosen so that it overlaps with the previous position to a certain extent. This redundancy in the data is used to retrieve the missing phase and thereby enables robust reconstruction of the complex aerial image of the object without the need for a reference beam or structure. It enables to simultaneously obtain both the phase and amplitude information of the sample with a two-dimensional scan, whereas lens-based imaging methods need through focus scans to extract the phase information. Moreover, SCDI can profit from a large depth-of-focus which is an inherent advantage of CDI methods. Since it is a lensless method, it does not rely on an optical setup and is therefore free of aberrations. The resolution of SCDI is typically limited by the numerical aperture (NA) of the detector, which defines the maximum spatial frequency information acquired. We note that the resolution can also can be limited by various other parameters such as the source stability, illumination parameters, scanning method, mechanical instabilities, detector noise, detector pixel number, and so on.