Microelectromechanical Systems (MEMS)

Development and characterization of resonator- and delay lines-based sensors on AlN/sapphire substrate for high-temperature application

[+] Author Affiliations
Jie Liu, Bin Yang, Jingquan Liu, Xiang Chen, Xiaolin Wang, Chunsheng Yang

Shanghai Jiao Tong University, National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Department of Micro/Nano Electronics, No. 800 Dong Chuan Road, Shanghai 200240, China

J. Micro/Nanolith. MEMS MOEMS. 15(4), 045002 (Oct 14, 2016). doi:10.1117/1.JMM.15.4.045002
History: Received August 3, 2016; Accepted September 23, 2016
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Abstract.  The performance of an AlN/sapphire temperature sensor operated at high temperature is investigated. To optimize the output performance, several different structural surface acoustic wave devices are fabricated, including one-port resonator and delay lines with various gaps. The effects of the electromechanical coupling coefficient (K2), insertion loss, and temperature coefficient of frequency on temperatures are demonstrated in detail. K2 increases with the increasing of the temperature and the insertion loss increases at the beginning, but decreases at higher temperatures due to the influence of the rising K2. The frequency responses of both the resonator and delay lines show very good linearity with temperature and both of them exhibit excellent stability.

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© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Jie Liu ; Bin Yang ; Jingquan Liu ; Xiang Chen ; Xiaolin Wang, et al.
"Development and characterization of resonator- and delay lines-based sensors on AlN/sapphire substrate for high-temperature application", J. Micro/Nanolith. MEMS MOEMS. 15(4), 045002 (Oct 14, 2016). ; http://dx.doi.org/10.1117/1.JMM.15.4.045002


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