Microelectromechanical Systems (MEMS)

MEMS mirror-control algorithm for optical switches

[+] Author Affiliations
Naru Nemoto, Joji Yamaguchi

Nippon Telegraph and Telephone Corporation, Device Innovation Center, 3-1 Morionosato Wakamiya, Atsugi-shi, Kanagawa 243-0198, Japan

J. Micro/Nanolith. MEMS MOEMS. 15(4), 045003 (Nov 29, 2016). doi:10.1117/1.JMM.15.4.045003
History: Received July 4, 2016; Accepted November 1, 2016
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Abstract.  We propose an optical-axis alignment technique with high accuracy and high speed using two microelectromechanical-systems mirrors as optical deflectors. The mirrors are vibrated by small perturbations with two different frequencies, and the angle errors of each mirror are separated accurately by applying discrete Fourier transformation on the waveform of the optical power. The cycle time of correction is 5 ms, and the optical power reaches the optimum level within 15 ms at 30-dB loss.

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© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Naru Nemoto and Joji Yamaguchi
"MEMS mirror-control algorithm for optical switches", J. Micro/Nanolith. MEMS MOEMS. 15(4), 045003 (Nov 29, 2016). ; http://dx.doi.org/10.1117/1.JMM.15.4.045003


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