Performance enhancement of an air-coupled multiple moving membrane capacitive micromachined ultrasonic transducer using an optimized middle plate configuration

Arezoo Emadi; Douglas Buchanan

doi:10.1117/1.JMM.15.4.045004

20 December 2016 Performance enhancement of an air-coupled multiple moving membrane capacitive micromachined ultrasonic transducer using an optimized middle plate configuration

Arezoo Emadi, Douglas Buchanan

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 15, Issue 4, 045004 (December 2016). https://doi.org/10.1117/1.JMM.15.4.045004

Abstract

A multiple moving membrane capacitive micromachined ultrasonic transducer has been developed. This transducer cell structure includes a second flexible plate suspended between the transducer top plate and the fixed bottom electrode. The added plate influences the transducer top plate deflection map and, therefore, the transducer properties. Three series of individual air-coupled, dual deflectable plate transducers and two 1×27 element transducer arrays were fabricated using multiuser microelectromechanical systems (MEMS) processes (MUMPs). Each set of transducers included devices with middle plate radii from 22% to 65% of the corresponding transducer top plate radius. The effect of the transducer middle plate configuration has been investigated. Electrical, optical, and acoustic characterizations were conducted and the results were compared with the simulation findings. It was found that the transducer top plate amplitude of vibration is significantly enhanced with a wider middle deflectable plate. The electrical and optical measurement results are shown to be in good agreement with simulation results. The acoustic measurement results indicated a 37% increase in the amplitude of transmitted signal by the 1-MHz air-couple transducer when its middle plate radius was increased by 35%.

Citation Download Citation

Arezoo Emadi and Douglas Buchanan "Performance enhancement of an air-coupled multiple moving membrane capacitive micromachined ultrasonic transducer using an optimized middle plate configuration," Journal of Micro/Nanolithography, MEMS, and MOEMS 15(4), 045004 (20 December 2016). https://doi.org/10.1117/1.JMM.15.4.045004

Received: 24 September 2016; Accepted: 21 November 2016; Published: 20 December 2016

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $24.00

Non-members: $28.00 ADD TO CART

JOURNAL ARTICLE
8 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Transducers

Acoustics

Ultrasonics

Optical testing

Electrodes

Microelectromechanical systems

Motion analysis

Show All Keywords

Keywords/Phrases

Search In:

Publication Years