JM3 Letters

Reliability testing of Ni-Fe as structural material in MEMS gyroscope

[+] Author Affiliations
Ankush Jain, Ram Gopal

MEMS and Microsensors Group, CSIR-Central Electronics Engineering Research Institute, Pilani-333031, Rajasthan, India

Academy of Scientific and Innovative Research, CSIR-Central Electronics Engineering Research Institute Campus, Pilani-333031, Rajasthan, India

J. Micro/Nanolith. MEMS MOEMS. 15(4), 040501 (Dec 30, 2016). doi:10.1117/1.JMM.15.4.040501
History: Received September 9, 2016; Accepted December 12, 2016
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Abstract.  We report reliability testing results for Ni-Fe when used as a structural material in a MEMS gyroscope. The tests are performed on a 2-degree-of-freedom torsional gyroscope fabricated by an SU-8-based ultraviolet-lithographie, galvanoformung, abformung process having 8-μm-thick Ni-Fe as the structural layer. The device is vacuum packaged in a 24-pin dual in-line package with a glass lid before measuring its frequency response and extracting the mode shapes using laser Doppler vibrometer. To check the reliability of the Ni-Fe structural layer, three types of tests, fatigue, shock, and vibration, are conducted. In fatigue testing, the packaged device is excited at its resonance frequency for more than a billion cycles, and it is checked periodically for any physical damage or change in the resonance frequency. The shock test is performed by dropping the device chip on a hard surface floor from 1 m height. The vibration test is carried out by subjecting the packaged device to more than 4g acceleration having frequency of 200 Hz for 30 min.

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© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Ankush Jain and Ram Gopal
"Reliability testing of Ni-Fe as structural material in MEMS gyroscope", J. Micro/Nanolith. MEMS MOEMS. 15(4), 040501 (Dec 30, 2016). ; http://dx.doi.org/10.1117/1.JMM.15.4.040501


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