JM3 Letters

Uncertainty in roughness measurements: putting error bars on line-edge roughness

[+] Author Affiliations
Chris A. Mack

Lithoguru.com, 1605 Watchhill Road, Austin, Texas 78703, United States

J. Micro/Nanolith. MEMS MOEMS. 16(1), 010501 (Jan 05, 2017). doi:10.1117/1.JMM.16.1.010501
History: Received September 19, 2016; Accepted December 12, 2016
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Abstract.  Measurement of line-edge or linewidth roughness involves uncertainty, like all measurements, and an estimate of that uncertainty should be reported whenever a roughness measurement is reported. However, roughness measurement uncertainty estimates are complicated by the correlations along the length of the rough feature. As a result, roughness measurements are often not accompanied by uncertainty estimates or error bars on graphs. Here, both theoretical considerations and simulations of random rough features will be used to derive a simple formula to estimate the uncertainty of a roughness measurement using the standard parameters describing that roughness: standard deviation, correlation length, and roughness exponent. Additionally, a more accurate formula to estimate the systematic bias in roughness standard deviation is provided.

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© 2017 Society of Photo-Optical Instrumentation Engineers

Citation

Chris A. Mack
"Uncertainty in roughness measurements: putting error bars on line-edge roughness", J. Micro/Nanolith. MEMS MOEMS. 16(1), 010501 (Jan 05, 2017). ; http://dx.doi.org/10.1117/1.JMM.16.1.010501


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