Uncertainty in roughness measurements: putting error bars on line-edge roughness

Chris A. Mack

doi:10.1117/1.JMM.16.1.010501

5 January 2017 Uncertainty in roughness measurements: putting error bars on line-edge roughness

Chris A. Mack

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 16, Issue 1, 010501 (January 2017). https://doi.org/10.1117/1.JMM.16.1.010501

Abstract

Measurement of line-edge or linewidth roughness involves uncertainty, like all measurements, and an estimate of that uncertainty should be reported whenever a roughness measurement is reported. However, roughness measurement uncertainty estimates are complicated by the correlations along the length of the rough feature. As a result, roughness measurements are often not accompanied by uncertainty estimates or error bars on graphs. Here, both theoretical considerations and simulations of random rough features will be used to derive a simple formula to estimate the uncertainty of a roughness measurement using the standard parameters describing that roughness: standard deviation, correlation length, and roughness exponent. Additionally, a more accurate formula to estimate the systematic bias in roughness standard deviation is provided.

Citation Download Citation

Chris A. Mack "Uncertainty in roughness measurements: putting error bars on line-edge roughness," Journal of Micro/Nanolithography, MEMS, and MOEMS 16(1), 010501 (5 January 2017). https://doi.org/10.1117/1.JMM.16.1.010501

Published: 5 January 2017

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