Microelectromechanical Systems (MEMS)

Design and fabrication of a MEMS-based gas sensor containing WO3 sensitive layer for detection of NO2

[+] Author Affiliations
Chengyang Wang, Jiandong Jin, Yuling Li, Wenbo Ding

China Electronics Technology Group Corporation, No. 49 Research Institute, Yiman Street, No. 29, Harbin 150001, China

Mingjun Dai

Jilin University, College of Electronic Science and Engineering, Qianjindajie Street, No. 2699, Changchun 130012, China

J. Micro/Nanolith. MEMS MOEMS. 16(1), 015002 (Jan 06, 2017). doi:10.1117/1.JMM.16.1.015002
History: Received June 21, 2016; Accepted December 12, 2016
Text Size: A A A

Abstract.  A gas sensor based on microelectromechanical systems (MEMS) technology containing a WO3 sensitive layer was designed, simulated, and fabricated. The gas sensor consists of a silicon substrate, a platinum microheater, gold interdigitated electrodes, and a WO3 sensitive layer. The active area with dimensions of 0.4  mm×0.4  mm is located at the center of a sensor (3  mm×3  mm). The experimental results show that the microheater provided heating for the WO3 sensitive layer at low power consumption and accurate temperature control. At a power consumption of only 40 mW, the temperature reached 319°C at the center of the MEMS platform with uniform heating. In addition to that, the above mentioned gas sensor exhibited a high response to NO2 with optimized sensitivity recorded at the working temperature of 170°C. With 10 ppb of NO2, the response of the sensor could reach up to 5.8 and the power consumption is 17.2 mW.

Figures in this Article
© 2017 Society of Photo-Optical Instrumentation Engineers

Citation

Chengyang Wang ; Jiandong Jin ; Yuling Li ; Wenbo Ding and Mingjun Dai
"Design and fabrication of a MEMS-based gas sensor containing WO3 sensitive layer for detection of NO2", J. Micro/Nanolith. MEMS MOEMS. 16(1), 015002 (Jan 06, 2017). ; http://dx.doi.org/10.1117/1.JMM.16.1.015002


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.