Micro-optoelectromechanical Systems (MOEMS)

Theoretical and experimental study of the photoelastic effect in channel waveguides in a diaphragm of LiNbO3

[+] Author Affiliations
Maryam Ali Akbar Ganji, Reza Asadi

Malek Ashtar University of Technology, Department of Electronics and Electrical Engineering, Tehran, Iran

J. Micro/Nanolith. MEMS MOEMS. 16(2), 025502 (Jun 01, 2017). doi:10.1117/1.JMM.16.2.025502
History: Received February 21, 2017; Accepted May 16, 2017
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Abstract.  The ability of the photoelastic effect in optical waveguides fabricated by Ti diffusion in a diaphragm of LiNbO3 for using as a pressure sensor has been investigated. We have studied the polarization rotation and phase difference between TE and TM polarizations for the light transmitted from the waveguide that are induced by the external pressure. We have also studied the effect of position of the waveguides in the diaphragm on the pressure sensor’s sensitivity. The polishing technique has been used to reduce the thickness of the diaphragm to 0.2 mm in order to increase the sensor’s sensitivity to about Pπ=170  kPa, which is equivalent to the pressure required for inducing phase difference of π rad between the TE and TM polarizations.

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© 2017 Society of Photo-Optical Instrumentation Engineers

Citation

Maryam Ali Akbar Ganji and Reza Asadi
"Theoretical and experimental study of the photoelastic effect in channel waveguides in a diaphragm of LiNbO3", J. Micro/Nanolith. MEMS MOEMS. 16(2), 025502 (Jun 01, 2017). ; http://dx.doi.org/10.1117/1.JMM.16.2.025502


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