Lithography

Wafer-scale fabrication of metal nanoring and nanocrescent arrays from nanoimprinted nanopillar arrays

[+] Author Affiliations
Congying Fan, Yushuang Cui, Changsheng Yuan, Haixiong Ge, Yanfeng Chen

Nanjing University, Department of Materials Science and Engineering, College of Engineering and Applied Sciences, National Laboratory of Solid State Microstructures, Nanjing, China

Xuelin Wang, Long Liu, Peng Zhan, Zhenlin Wang

Nanjing University, School of Physics, National Laboratory of Solid State Microstructures, Nanjing, China

Jian Zhang

Chinese Academy of Sciences, Suzhou Institute of Nano-Tech and Nano-Bionics, Suzhou, China

J. Micro/Nanolith. MEMS MOEMS. 16(3), 033501 (Jun 30, 2017). doi:10.1117/1.JMM.16.3.033501
History: Received April 30, 2017; Accepted June 9, 2017
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Abstract.  An approach was presented to fabricate wafer-scale nanoring structures based on nanopillar array templates fabricated by nanoimprint lithography. This fabrication method combined UV-curing nanolithography technology, metal deposition, and an etching process, which made it possible to tune the geometric properties of nanorings: height, diameter, and linewidth for various materials, such as Au and Ni. Nanoring arrays showed potential applications in many fields, including memory storage, biosensing, and optical devices. The optical measurement of Au nanorings (d=380  nm) showed its strong transmission resonances at the wavelength of 2.1  μm. A modified version of this fabrication method by depositing Ni in a controlled angle as a sacrificial layer was also utilized to create nanocrescent arrays. This modified method could easily tune the width of crescents through the nickel deposition angles and nanopillar template heights. The large-area gold nanocrescent arrays showed strong polarization-dependent transmission bands. Plasmonic crescent structures were expected to apply in infrared metamaterial and chemical sensing.

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© 2017 Society of Photo-Optical Instrumentation Engineers

Citation

Congying Fan ; Xuelin Wang ; Long Liu ; Jian Zhang ; Yushuang Cui, et al.
"Wafer-scale fabrication of metal nanoring and nanocrescent arrays from nanoimprinted nanopillar arrays", J. Micro/Nanolith. MEMS MOEMS. 16(3), 033501 (Jun 30, 2017). ; http://dx.doi.org/10.1117/1.JMM.16.3.033501


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