CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume PC12054 > Article
Presentation
13 June 2022 Strongly-segregating chemically tailored polystyrene-b-polymethacrylates for sub-10 nm patterning
Teruaki Hayakawa, Shinsuke Maekawa, Yasunari Yoshimura, Lei Dong, Yuta Nabae, Takehiro Seshimo, Takahiro Dazai, Kazufumi Sato
Author Affiliations +
Proceedings Volume PC12054, Novel Patterning Technologies 2022; PC1205406 (2022) https://doi.org/10.1117/12.2618062
Event: SPIE Advanced Lithography + Patterning, 2022, San Jose, California, United States
Abstract
We have developed strongly-segregating chemically tailored block copolymers (BCPs), a series of post-functionalized polystyrene-b-polymethacrylates capable of forming sub-10 nm perpendicular lamellae on thin films with ease by thermal annealing. The desired block copolymers based on polystyrene-b-polymethacrylates were successfully synthesized by the post-functionalization of poly(glycidyl methacrylate)s and thiol derivatives via thiol-epoxy reaction. To work towards clarifying the essential key to the perpendicular orientation of microdomains, we studied the correlation between the primary structures based on the new concept of molecular design and microphase-separated nanostructures in bulk and thin films.
Conference Presentation
© (2022) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Teruaki Hayakawa, Shinsuke Maekawa, Yasunari Yoshimura, Lei Dong, Yuta Nabae, Takehiro Seshimo, Takahiro Dazai, and Kazufumi Sato "Strongly-segregating chemically tailored polystyrene-b-polymethacrylates for sub-10 nm patterning", Proc. SPIE PC12054, Novel Patterning Technologies 2022, PC1205406 (13 June 2022); https://doi.org/10.1117/12.2618062
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 PRESENTATION
WATCH
PRESENTATION SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
KEYWORDS
Optical lithography
Thin films
Annealing
Scanning electron microscopy
Lithography
Transmission electron microscopy
Polymerization
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top