Mirror-based EUV interference lithography: one step closer to the ultimate resolution

Iason Giannopoulos; Iacopo Mochi; Michaela Vockenhuber; Yasin Ekinci; Dimitrios Kazazis

doi:10.1117/12.2658011

30 April 2023 Mirror-based EUV interference lithography: one step closer to the ultimate resolution

Iason Giannopoulos, Iacopo Mochi, Michaela Vockenhuber, Yasin Ekinci, Dimitrios Kazazis

Proceedings Volume PC12494, Optical and EUV Nanolithography XXXVI; PC1249406 (2023) https://doi.org/10.1117/12.2658011
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Abstract

EUV interference lithography (EUV-IL) plays an essential role in developing photoresist materials for EUV lithography. Hitherto, the highest resolution has been achieved by diffraction gratings positioned on thin transparent membranes. Yet, these gratings are tied in with critical fabrication challenges when aiming towards the ultimate resolution at the sub-10 nm half-pitch regime. To this end, we present an EUV-IL setup based on light reflection upon two low-absorption mirrors. Combined with brilliant and coherent synchrotron light, this Lloyd’s mirror-inspired device delivers single-digit HP patterning with remarkable efficiency and throughput.

Conference Presentation

Citation Download Citation

Iason Giannopoulos, Iacopo Mochi, Michaela Vockenhuber, Yasin Ekinci, and Dimitrios Kazazis "Mirror-based EUV interference lithography: one step closer to the ultimate resolution", Proc. SPIE PC12494, Optical and EUV Nanolithography XXXVI, PC1249406 (30 April 2023); https://doi.org/10.1117/12.2658011

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available