Template-Set Approach to VLSI Pattern Inspection

Soo-Ik Chae; James T. Walker; David H. Dameron; Chong-Cheng Fu; James D. Meindl

doi:10.1117/12.937868

18 May 1987 Template-Set Approach to VLSI Pattern Inspection

Soo-Ik Chae, James T. Walker, David H. Dameron, Chong-Cheng Fu, James D. Meindl

Proceedings Volume 0730, Automated Inspection and Measurement; (1987) https://doi.org/10.1117/12.937868
Event: Cambridge Symposium_Intelligent Robotics Systems, 1986, Cambridge, MA, United States

Abstract

A new approach is described for the automatic detection of defects in VLSI circuit patterns such as photomasks and wafers. It is based on morphological feature extraction using templates that represent a set of local pixel configurations within a specified window. These templates are stored in content-addressable memories (CAMs) to facilitate parallel comparisons of window-pattern scanning over a tested image. Maskable CAMs reduce the size of a template set substantially. Two error-detection algorithms are implemented to detect both random defects and dimensional errors.

Citation Download Citation

Soo-Ik Chae, James T. Walker, David H. Dameron, Chong-Cheng Fu, and James D. Meindl "Template-Set Approach to VLSI Pattern Inspection", Proc. SPIE 0730, Automated Inspection and Measurement, (18 May 1987); https://doi.org/10.1117/12.937868

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