The Commercialization Of Engineered Diamond Technology

M. Peters; J M Pinneo; L S Plano; K V Ravi; V Versteeg; S Yokota

doi:10.1117/12.943943

18 May 1988 The Commercialization Of Engineered Diamond Technology

M. Peters, J M Pinneo, L S Plano, K V Ravi, V Versteeg, S Yokota

Proceedings Volume 0877, Micro-Optoelectronic Materials; (1988) https://doi.org/10.1117/12.943943
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States

Abstract

Some of the commercial aspects of thin diamond films deposited by plasma enhanced chemical vapor deposition are reviewed. Diamond films deposited by the use of DC bias have been characterized by using a variety of techniques including Raman spectroscopy and scanning electron microscopy. The relationship between deposition conditions and film characteristics are discussed.

Citation Download Citation

M. Peters, J M Pinneo, L S Plano, K V Ravi, V Versteeg, and S Yokota "The Commercialization Of Engineered Diamond Technology", Proc. SPIE 0877, Micro-Optoelectronic Materials, (18 May 1988); https://doi.org/10.1117/12.943943

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