Mix-and-match considerations for EUV insertion in N7 HVM

Xuemei Chen; Allen Gabor; Pavan Samudrala; Sheldon Meyers; Erik Hosler; Richard Johnson; Nelson Felix

doi:10.1117/12.2258674

24 March 2017 Mix-and-match considerations for EUV insertion in N7 HVM

Xuemei Chen, Allen Gabor, Pavan Samudrala, Sheldon Meyers, Erik Hosler, Richard Johnson, Nelson Felix

Proceedings Volume 10143, Extreme Ultraviolet (EUV) Lithography VIII; 101430F (2017) https://doi.org/10.1117/12.2258674
Event: SPIE Advanced Lithography, 2017, San Jose, California, United States

Abstract

An optimal mix-match control strategy for EUV and 193i scanners is crucial for the insertion of EUV lithography at 7nm technology node. The systematic differences between these exposure systems introduce additional cross-platform mixmatch overlay errors. In this paper, we quantify the EUV specific contributions to mix-match overlay, and explore the effectiveness of higher-order interfield and intrafield corrections on minimizing the on-product mix-match overlay errors. We also analyze the impact of intra-field sampling plans in terms of model accuracy and adequacy in capturing EUV specific intra-field signatures. Our analysis suggests that more intra-field measurements and appropriate placement of the metrology targets within the field are required to achieve the on-product overlay control goals for N7 HVM.

Conference Presentation

Citation Download Citation

Xuemei Chen, Allen Gabor, Pavan Samudrala, Sheldon Meyers, Erik Hosler, Richard Johnson, and Nelson Felix "Mix-and-match considerations for EUV insertion in N7 HVM", Proc. SPIE 10143, Extreme Ultraviolet (EUV) Lithography VIII, 101430F (24 March 2017); https://doi.org/10.1117/12.2258674

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available