Image contrast enhancement of multiple patterning features through lower light source bandwidth

Paolo Alagna; Will Conley; Greg Rechtsteiner; Kathleen Nafus; Serge Biesemans

doi:10.1117/12.2263228

30 March 2017 Image contrast enhancement of multiple patterning features through lower light source bandwidth

Paolo Alagna, Will Conley, Greg Rechtsteiner, Kathleen Nafus, Serge Biesemans

Proceedings Volume 10147, Optical Microlithography XXX; 101470N (2017) https://doi.org/10.1117/12.2263228
Event: SPIE Advanced Lithography, 2017, San Jose, California, United States

Abstract

DUV immersion lithography (ArFi) continues to be the primary lithographic method for semiconductor manufacturers. Use of ArFi lithography requires patterning budget improvements in the range of 1/10 nm especially for interconnect layers^[1]; for advanced process technology nodes, every Angstrom counts. Previous investigations into the effects of light source bandwidth on imaging performance have provided the foundation for this work^[2-10]. This study will focus on the increase in image contrast that 200 fm light source E95 bandwidth enables on Self-Aligned Double Patterning (SADP) and Self-Aligned Quadruple Patterning (SAQP) features. The impact of 200 fm E95 bandwidth on the CD and Edge Placement Error (EPE) performance of core (grating) and block features will be assessed using an imec 7 nm process node test vehicle. The on wafer experimental results will be compared with the simulation predicted responses of the target features to lower light source bandwidth.

Conference Presentation

Citation Download Citation

Paolo Alagna, Will Conley, Greg Rechtsteiner, Kathleen Nafus, and Serge Biesemans "Image contrast enhancement of multiple patterning features through lower light source bandwidth", Proc. SPIE 10147, Optical Microlithography XXX, 101470N (30 March 2017); https://doi.org/10.1117/12.2263228

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available