Comparative study of CF4- and CHF3-based plasmas for dry etching applications

A. Efremov; K.-H. Kwon; A. Morgunov; D. Shabadarova

doi:10.1117/12.2266715

30 December 2016 Comparative study of CF₄- and CHF₃-based plasmas for dry etching applications

A. Efremov, K.-H. Kwon, A. Morgunov, D. Shabadarova

Proceedings Volume 10224, International Conference on Micro- and Nano-Electronics 2016; 102241W (2016) https://doi.org/10.1117/12.2266715
Event: The International Conference on Micro- and Nano-Electronics 2016, 2016, Zvenigorod, Russian Federation

Abstract

The influence of O₂/Ar mixing ratio on plasma characteristics, densities and fluxes of active species determining the dry etching kinetics in both CF₄/O₂/Ar and CHF3/O2/Ar plasmas was studied. The investigation combined plasma diagnostics by Langmuir probes and zero-dimensional plasma modeling. It was found that the substitution of O₂ for Ar at constant fraction of CF₄ or CHF₃ in a feed gas noticeably changes electron temperature and electron density, but does not result in the non-monotonic behavior of F atom density. The differences between two gas systems were discussed in details from the point of view of plasma chemistry.

Citation Download Citation

A. Efremov, K.-H. Kwon, A. Morgunov, and D. Shabadarova "Comparative study of CF₄- and CHF₃-based plasmas for dry etching applications", Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102241W (30 December 2016); https://doi.org/10.1117/12.2266715

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available