Presentation + Paper
13 June 2017 Gravimetric humidity sensor based on ZnO nanorods covered piezoresistive Si microcantilever
Jiushuai Xu, Maik Bertke, Xiaojing Li, Alaaeldin Gad, Hao Zhou, Hutomo Suryo Wasisto, Erwin Peiner
Author Affiliations +
Proceedings Volume 10246, Smart Sensors, Actuators, and MEMS VIII; 102460C (2017) https://doi.org/10.1117/12.2264897
Event: SPIE Microtechnologies, 2017, Barcelona, Spain
Abstract
A ZnO nanorods film covered silicon resonant cantilever sensor is developed for atmosphere humidity detection by monitoring the resonant frequency shifts induced by the additional weight of adsorbed water molecules. Two different crystalline seed-layer deposition methods were applied to grow different nanorods films. The morphology of the ZnO films were characterized and the sensor sensitivities were measured under different relative humidity (RH) levels. The experiments results showed that this novel humidity sensor with ZnO nanorods has a sensitivity of 101.5 ± 12.0 ppm/RH% (amount of adsorbed water of 36.9 ± 4.4 ng/RH%), indicating its potential for portable sensing applications.
Conference Presentation
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jiushuai Xu, Maik Bertke, Xiaojing Li, Alaaeldin Gad, Hao Zhou, Hutomo Suryo Wasisto, and Erwin Peiner "Gravimetric humidity sensor based on ZnO nanorods covered piezoresistive Si microcantilever", Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 102460C (13 June 2017); https://doi.org/10.1117/12.2264897
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CITATIONS
Cited by 5 scholarly publications.
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KEYWORDS
Zinc oxide

Humidity

Sensors

Nanorods

Silicon

Crystals

Actuators

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