Increasing EUV source efficiency via recycling of radiation power

Ahmed Hassanein; Valeryi Sizyuk; Tatyana Sizyuk; Kenneth C. Johnson

doi:10.1117/12.2297254

19 March 2018 Increasing EUV source efficiency via recycling of radiation power

Ahmed Hassanein, Valeryi Sizyuk, Tatyana Sizyuk, Kenneth C. Johnson

Proceedings Volume 10583, Extreme Ultraviolet (EUV) Lithography IX; 1058319 (2018) https://doi.org/10.1117/12.2297254
Event: SPIE Advanced Lithography, 2018, San Jose, California, United States

Abstract

EUV source power is critical for advanced lithography, for achieving economical throughput performance and also for minimizing stochastic patterning effects. Power conversion efficiency can be increased by recycling plasma-scattered laser radiation and other out-of-band radiation back to the plasma via retroreflective optics. Radiation both within and outside of the collector light path can potentially be recycled. For recycling within the collector path, the system uses a diffractive collection mirror that concomitantly filters all laser and out-of-band radiation out of the EUV output. In this paper we review the optical design concept for power recycling and present preliminary plasma-physics simulation results showing a potential gain of 60% in EUV conversion efficiency.

Citation Download Citation

Ahmed Hassanein, Valeryi Sizyuk, Tatyana Sizyuk, and Kenneth C. Johnson "Increasing EUV source efficiency via recycling of radiation power", Proc. SPIE 10583, Extreme Ultraviolet (EUV) Lithography IX, 1058319 (19 March 2018); https://doi.org/10.1117/12.2297254

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