MEMS gravity sensors for imaging density anomalies

Andreas Noack; Richard Middlemiss; Abhinav Prasad; Giles Hammond

doi:10.1117/12.2323969

7 September 2018 MEMS gravity sensors for imaging density anomalies

Andreas Noack, Richard Middlemiss, Abhinav Prasad, Giles Hammond

Proceedings Volume 10723, Optical Trapping and Optical Micromanipulation XV; 107230J (2018) https://doi.org/10.1117/12.2323969
Event: SPIE Nanoscience + Engineering, 2018, San Diego, California, United States

Abstract

Gravimeters measure small changes in the local gravitational acceleration. They are applied for environmental monitoring, oil and gas prospecting and defence and security. Gravimeters used in these applications have a remarkable sensitivity but at a cost of being bulky and very expensive. Recently, a micro-electrical mechanical system (MEMS) gravimeter has been developed, which was cheap, had a comparable sensitivity to commercial gravimeters and maintained its stability over long timescales (10−6 Hz). In this paper we discuss to replace the current shadow sensor readout with an on-chip interferometer. This new readout has a higher sensitivity so that the device can be more robust and reduces the system size. The design of this readout is discussed and the first experimental results are presented. The new readout improves the imaging capabilities of density anomalies of the device.

Conference Presentation

Citation Download Citation

Andreas Noack, Richard Middlemiss, Abhinav Prasad, and Giles Hammond "MEMS gravity sensors for imaging density anomalies", Proc. SPIE 10723, Optical Trapping and Optical Micromanipulation XV, 107230J (7 September 2018); https://doi.org/10.1117/12.2323969

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available