Dynamic fractal digital lithography for the fabrication of microlens array

Zhimin Zhang; Zhihuai Liu; Ningning Luo

doi:10.1117/12.2504760

24 January 2019 Dynamic fractal digital lithography for the fabrication of microlens array

Zhimin Zhang, Zhihuai Liu, Ningning Luo

Proceedings Volume 10840, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics; 1084012 (2019) https://doi.org/10.1117/12.2504760
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

To improve the transverse resolution of digital mask lithography pattern, we present a novel dynamic fractal digital lithography to fabricate microlens array. The basic idea of this technique is to divide a high-frequency digital mask into a group of low-frequency masks by using equal-height-rounding quantization. Consequently, dynamic fractal digital lithography has the advantage in decrease of mask quantity and mask quantization error. Then these low-frequency masks are exposed in sequence and the superimposed exposure of multiple masks takes the place of single exposure of original high-frequency mask. We demonstrate the feasibility of dynamic fractal digital lithography by experimental fabrication. The uniform microlens array with smooth surface and clear edge profile are achieved.

Citation Download Citation

Zhimin Zhang, Zhihuai Liu, and Ningning Luo "Dynamic fractal digital lithography for the fabrication of microlens array", Proc. SPIE 10840, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics, 1084012 (24 January 2019); https://doi.org/10.1117/12.2504760

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available