Sub-half-micron Patterning Characteristics of Silicone-based Positive (SPP) and Negative (SNP) Resists in KrF Excimer Laser Lithography

Yoshio Kawai; Akinobu Tanaka; Yoshiharu Ozaki; Kiichi Takamoto; Akira Yoshikawa

doi:10.1117/12.953029

30 January 1989 Sub-half-micron Patterning Characteristics of Silicone-based Positive (SPP) and Negative (SNP) Resists in KrF Excimer Laser Lithography

Yoshio Kawai, Akinobu Tanaka, Yoshiharu Ozaki, Kiichi Takamoto, Akira Yoshikawa

Author Affiliations +

Proceedings Volume 1086, Advances in Resist Technology and Processing VI; (1989) https://doi.org/10.1117/12.953029
Event: 1989 Santa Clara Symposium on Microlithography, 1989, San Jose, CA, United States

Abstract

The concept is attained that controlling of the dissolution rate ratio between completely exposed and unexposed resist areas is useful for obtaining steeper resist profiles and higher resolution when resists have high absorbance. Its usefulness is confirmed by experiments. Using 0.4 μm thick SPP with absorbance of 0.4, the linear relation between mask and resist pattern line widths is maintained to 0.40 μm line and space patterns. 0.36 μm line and space patterns with vertical walls are obtained in 0.4 μm thick SNP with absorbance of 1.2.

Citation Download Citation

Yoshio Kawai, Akinobu Tanaka, Yoshiharu Ozaki, Kiichi Takamoto, and Akira Yoshikawa "Sub-half-micron Patterning Characteristics of Silicone-based Positive (SPP) and Negative (SNP) Resists in KrF Excimer Laser Lithography", Proc. SPIE 1086, Advances in Resist Technology and Processing VI, (30 January 1989); https://doi.org/10.1117/12.953029

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available