Effects of Line Narrowing and Collimation on Excimer Radiation at 248nm

William N. Partlo; Chris A. Spence; William G. Oldham

doi:10.1117/12.953174

25 July 1989 Effects of Line Narrowing and Collimation on Excimer Radiation at 248nm

William N. Partlo, Chris A. Spence, William G. Oldham

Proceedings Volume 1088, Optical/Laser Microlithography II; (1989) https://doi.org/10.1117/12.953174
Event: 1989 Santa Clara Symposium on Microlithography, 1989, San Jose, CA, United States

Abstract

The relevant characteristics of a 248 nm line-narrowed excimer laser have been measured. The laser's spectral width is 1.6 pm FWHM and its coherence length is 38 mm. The effects of this line narrowing on the optical components in illuminator systems have been studied. The results from several light pipe systems and a diffuser plate system are presented. The effects of external cavity collimation on the GCA-TROPEL BOLD illuminator are also presented.

Citation Download Citation

William N. Partlo, Chris A. Spence, and William G. Oldham "Effects of Line Narrowing and Collimation on Excimer Radiation at 248nm", Proc. SPIE 1088, Optical/Laser Microlithography II, (25 July 1989); https://doi.org/10.1117/12.953174

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