SALELE process from theory to fabrication

Youssef Drissi; Werner Gillijns; Jae Uk Lee; Ryan Ryoung han Kim; Ahmed Hamed-Fatehy; Rehab Kotb; Rajiv Naresh Sejpal; Germain Fenger; James Word

doi:10.1117/12.2517051

21 March 2019 SALELE process from theory to fabrication

Youssef Drissi, Werner Gillijns, Jae Uk Lee, Ryan Ryoung han Kim , Ahmed Hamed-Fatehy, Rehab Kotb, Rajiv Naresh Sejpal, Germain Fenger, James Word

Author Affiliations +

Proceedings Volume 10962, Design-Process-Technology Co-optimization for Manufacturability XIII; 109620V (2019) https://doi.org/10.1117/12.2517051
Event: SPIE Advanced Lithography, 2019, San Jose, California, United States

Abstract

In this work we are introducing a manufacturing flow for the SALELE Process in details. Starting with layout decomposition, where the drawn layer is decomposed into 4 Masks: 2 Metal-like Masks, and 2 Block-like Masks. Then each of these masks is subjected to Optical Proximity Correction (OPC) process, and here we explain more about the OPC recipe development for each mask. Then we introduce a verification flow that performs two levels of verifications: (a) Litho verification, where the litho fidelity of each mask is quantified based on image quality measurements. (b) Final Manufactured shapes verification vs. expected output. This work has been carried out on an N3 candidate layout designed by IMEC.

Citation Download Citation

Youssef Drissi, Werner Gillijns, Jae Uk Lee, Ryan Ryoung han Kim , Ahmed Hamed-Fatehy, Rehab Kotb, Rajiv Naresh Sejpal, Germain Fenger, and James Word "SALELE process from theory to fabrication", Proc. SPIE 10962, Design-Process-Technology Co-optimization for Manufacturability XIII, 109620V (21 March 2019); https://doi.org/10.1117/12.2517051

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