High-accuracy autocollimator calibration by interferometric 2D angle generator

V. Heikkinen; V. Byman; M. Shpak; R. Geckeler; A. Just; M. Krause; M. Schumann; A. Lassila

doi:10.1117/12.2531023

9 September 2019 High-accuracy autocollimator calibration by interferometric 2D angle generator

V. Heikkinen, V. Byman, M. Shpak, R. Geckeler, A. Just, M. Krause, M. Schumann, A. Lassila

Proceedings Volume 11109, Advances in Metrology for X-Ray and EUV Optics VIII; 1110903 (2019) https://doi.org/10.1117/12.2531023
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

Autocollimators are excellent measuring tools for many applications, such as adjustments or characterizations of precision mechanics, optics and instruments. Autocollimators have several characteristic error sources due to misalignment or nonideality of the collimator lens, the light source and the sensor. To fully characterize errors related to simultaneous engagement of both measurement axes of the autocollimator a two directional angle generator is necessary.

In this paper, VTT MIKES interferometric 2-directional small angle generator (I2D-SAG) with updated model for calibration of autocollimators is described. It generates angles around 2 orthogonal axes with high accuracy. The maximum range of the I2D-SAG is ±1000” for both axes. In calibration of a high quality autocollimator a standard uncertainty below 0.01” can be reached.

In addition, preliminary results of a comparison of I2D-SAG and PTB Spatial Angle Autocollimator Calibrator (SAAC) instrument are presented. This is the first comparison between 2D autocollimator calibration systems. In this comparison, a good agreement was reached in characterization of an electronic autocollimator over 900”×900” range.

Citation Download Citation

V. Heikkinen, V. Byman, M. Shpak, R. Geckeler, A. Just, M. Krause, M. Schumann, and A. Lassila "High-accuracy autocollimator calibration by interferometric 2D angle generator", Proc. SPIE 11109, Advances in Metrology for X-Ray and EUV Optics VIII, 1110903 (9 September 2019); https://doi.org/10.1117/12.2531023

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KEYWORDS

Autocollimators

Calibration

Interferometers

Reflectors

Interferometry

Mirrors

Sensors

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