Silicon nitride ring resonator biosensors fabricated at AIM Photonics: detection of cytokines (Conference Presentation)

Benjamin L. Miller; Michael R. Bryan; John S. Cognetti; Daniel J. Steiner

doi:10.1117/12.2553072

10 March 2020 Silicon nitride ring resonator biosensors fabricated at AIM Photonics: detection of cytokines (Conference Presentation)

Benjamin L. Miller, Michael R. Bryan, John S. Cognetti, Daniel J. Steiner

Author Affiliations +

Proceedings Volume 11258, Frontiers in Biological Detection: From Nanosensors to Systems XII; 112580C (2020) https://doi.org/10.1117/12.2553072
Event: SPIE BiOS, 2020, San Francisco, California, United States

Abstract

Ring resonators fabricated in silicon or silicon nitride constitute one of the most versatile and widely studied platform photonic technologies for biosensing. As part of an effort by AIM Photonics to advance the photonics manufacturing infrastructure of the United States, we have designed, fabricated, and tested a series of silicon nitride ring resonators for biosensing. Optimized designs will be incorporated into the AIM Photonics photonic design kit (PDK) and made available to the broader community. This talk will describe the evolution of our designs and their performance, with a particular focus on the detection of cytokines under microfluidic flow.

Conference Presentation

Citation Download Citation

Benjamin L. Miller, Michael R. Bryan, John S. Cognetti, and Daniel J. Steiner "Silicon nitride ring resonator biosensors fabricated at AIM Photonics: detection of cytokines (Conference Presentation)", Proc. SPIE 11258, Frontiers in Biological Detection: From Nanosensors to Systems XII, 112580C (10 March 2020); https://doi.org/10.1117/12.2553072

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