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22 April 2020 Electrically controlled millimeter-scale valve based on a hydraulically amplified dielectric actuator (Conference Presentation)
Edouard Leroy, Herbert Shea
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Proceedings Volume 11375, Electroactive Polymer Actuators and Devices (EAPAD) XXII; 1137510 (2020) https://doi.org/10.1117/12.2557751
Event: SPIE Smart Structures + Nondestructive Evaluation, 2020, Online Only
Abstract
We present a very thin, fast and flexible fluidic valve based on a hydraulically amplified dielectric actuator. A thin cavity made by bonding flexible membranes and including central stretchable region made of silicone is filled with dielectric fluid. Under an electric field, the fluid is displaced from the edges of the cavity to the central region, inflating the center of the actuator and closing a valve. The valve dimensions are less than 10x10x1mm. The valve can block a pressure up to 1Bar in less than 10ms for a 1 mm diameter inlet using a voltage of 1.4kV. Arrays of such valves are easily fabricated with inexpensive materials.
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Edouard Leroy and Herbert Shea "Electrically controlled millimeter-scale valve based on a hydraulically amplified dielectric actuator (Conference Presentation)", Proc. SPIE 11375, Electroactive Polymer Actuators and Devices (EAPAD) XXII, 1137510 (22 April 2020); https://doi.org/10.1117/12.2557751
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KEYWORDS
Actuators
Dielectrics
Microfluidics
Laser bonding
Oxygen
Parallel computing
Plasma treatment
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