Illumination System Of An Excimer Laser Stepper

Yutaka Ichihara; Shintaro Kawata; Ikuo Hikima; Masato Hamatani; Yuuji Kudoh; Akikazu Tanimoto

doi:10.1117/12.961754

11 October 1989 Illumination System Of An Excimer Laser Stepper

Yutaka Ichihara, Shintaro Kawata, Ikuo Hikima, Masato Hamatani, Yuuji Kudoh, Akikazu Tanimoto

Proceedings Volume 1138, Optical Microlithography and Metrology for Microcircuit Fabrication; (1989) https://doi.org/10.1117/12.961754
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France

Abstract

An illumination system suitable for an excimer laser stepper has been investigated. Unnecessary interference pattern(speckel) is reduced effectively by scanning the laser beam. We report spatial coherence of the lasers with different spectral line width, illumination system of the stepper, appearance of the interference pattern,its spacing and contrust and their relation to the illumination system and to the coherence of the laser. Then we report reduction of this pattern together with a simple method to measure its contrast.

Citation Download Citation

Yutaka Ichihara, Shintaro Kawata, Ikuo Hikima, Masato Hamatani, Yuuji Kudoh, and Akikazu Tanimoto "Illumination System Of An Excimer Laser Stepper", Proc. SPIE 1138, Optical Microlithography and Metrology for Microcircuit Fabrication, (11 October 1989); https://doi.org/10.1117/12.961754

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