Paper
17 April 2020 Finite-element-method study of a new type water cooling deformable mirror
Yao-ping Zhang, Guo-yun Long, Xin-yu Zhang, Jun-qi Fan, Hao Cui
Author Affiliations +
Proceedings Volume 11455, Sixth Symposium on Novel Optoelectronic Detection Technology and Applications; 114553C (2020) https://doi.org/10.1117/12.2564627
Event: Sixth Symposium on Novel Photoelectronic Detection Technology and Application, 2019, Beijing, China
Abstract
In order to reduce the thermal distortion of the deformable mirror(DM) and improve the laser beam quality, a new type of a 19-element water cooling deformable mirror was developed, and the finite element model of DM with water cooling part was built. The deformation, temperature rising and high-order aberrations were calculated after applying the laser irradiation to the mirror. Based on the results, we found the distortions and temperature rising of DM with water cooling part are much lower than those without it. The thermal distortion and temperature rising decreased from 0.316 μm to 0.210 μm and from 30.3°C to 27.1°C respectively, and the corresponding removed low-order Zernike coefficient residual error was reduced from 0.068 μm to 0.043 μm. The high-order aberrations between them were different. The results have practical engineering application for the design of DM in future higher power laser systems
© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yao-ping Zhang, Guo-yun Long, Xin-yu Zhang, Jun-qi Fan, and Hao Cui "Finite-element-method study of a new type water cooling deformable mirror", Proc. SPIE 11455, Sixth Symposium on Novel Optoelectronic Detection Technology and Applications, 114553C (17 April 2020); https://doi.org/10.1117/12.2564627
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KEYWORDS
Mirrors

Actuators

Laser irradiation

Deformable mirrors

Finite element methods

Silicon

Laser systems engineering

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