Towards high NA patterning readiness: materials, processes and etch transfer for P24 Line Space

A. Thiam; J. G. Santaclara; J-H. Franke; F. Schleicher; R. Blanc; P. Bezard; A. Moussa; P. Wong; E. Hendrickx; M. J. Maslow

doi:10.1117/12.2601839

19 October 2021 Towards high NA patterning readiness: materials, processes and etch transfer for P24 Line Space

A. Thiam, J. G. Santaclara, J-H. Franke, F. Schleicher, R. Blanc, P. Bezard, A. Moussa, P. Wong, E. Hendrickx, M. J. Maslow

Author Affiliations +

Proceedings Volume 11854, International Conference on Extreme Ultraviolet Lithography 2021; 118540A (2021) https://doi.org/10.1117/12.2601839
Event: SPIE Photomask Technology + EUV Lithography, 2021, Online Only

Abstract

The goal of this work is to prepare process readiness towards High NA EUV lithography, by using 0.33NA exposures on NXE3400B scanner. We focus on photoresists, underlayers and etch processes mitigation of P24nm Line Space patterns. Etch transfer has been validated for Metal Oxide Resist (MOR). Furthermore, we investigate challenges to accelerate Chemically Amplified Resist (CAR) P24nm Line Space processes. Also, here, promising patterning results have been achieved. Thin film metrology-friendly methods like Atomic Force Microscopy (AFM) have been performed to characterize and improve the CAR-based etch processes.

Conference Presentation

Citation Download Citation

A. Thiam, J. G. Santaclara, J-H. Franke, F. Schleicher, R. Blanc, P. Bezard, A. Moussa, P. Wong, E. Hendrickx, and M. J. Maslow "Towards high NA patterning readiness: materials, processes and etch transfer for P24 Line Space", Proc. SPIE 11854, International Conference on Extreme Ultraviolet Lithography 2021, 118540A (19 October 2021); https://doi.org/10.1117/12.2601839

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available