Low loss titanium dioxide strip loaded waveguide on thin-film lithium niobate at 1550nm

Xiaofeng Zhu; Andrew J. Mercante; Shouyuan Shi; Yao Peng; Dennis W. Prather

doi:10.1117/12.2614601

4 March 2022 Low loss titanium dioxide strip loaded waveguide on thin-film lithium niobate at 1550nm

Xiaofeng Zhu, Andrew J. Mercante, Shouyuan Shi, Yao Peng, Dennis W. Prather

Proceedings Volume 11997, Optical Components and Materials XIX; 1199705 (2022) https://doi.org/10.1117/12.2614601
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

This paper presents the use of TiO₂ as a strip loaded waveguide on thin-film lithium niobate (TFLN). The waveguides were fabricated by using an RF reactive sputtering deposition followed by a dielectric lift-off process. An additional layer of SiO2 was deposited as a cladding layer using a plasma-enhanced chemical vapor deposition (PECVD). To characterize this process, atomic-force-microscopy (AFM) and an ellipsometer were used. Lastly, a propagation loss of 1.26dB/cm at 1550nm was experimentally measured by Optical Backscatter reflectometry (OBR) and are presented in this paper.

Conference Presentation

Citation Download Citation

Xiaofeng Zhu, Andrew J. Mercante, Shouyuan Shi, Yao Peng, and Dennis W. Prather "Low loss titanium dioxide strip loaded waveguide on thin-film lithium niobate at 1550nm", Proc. SPIE 11997, Optical Components and Materials XIX, 1199705 (4 March 2022); https://doi.org/10.1117/12.2614601

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available