Calibration of Gaussian random field stochastic EUV models

Azat Latypov; Chih-I Wei; Peter De Bisschop; Gurdaman Khaira; Germain Fenger

doi:10.1117/12.2614142

26 May 2022 Calibration of Gaussian random field stochastic EUV models

Azat Latypov, Chih-I Wei, Peter De Bisschop, Gurdaman Khaira, Germain Fenger

Proceedings Volume 12051, Optical and EUV Nanolithography XXXV; 1205105 (2022) https://doi.org/10.1117/12.2614142
Event: SPIE Advanced Lithography + Patterning, 2022, San Jose, California, United States

Abstract

Typical photoresists processes include a small set of photo-chemical reactions, with each reaction represented by many statistically identically distributed and independent instances. These instances eventually combine into the resist deprotection function, resulting, by virtue of the Central Limit Theorem, in Gaussian Random Field deprotection models. We discuss and demonstrate the approaches to calibration of such models, based on experimentally measured edges of lithographic features, their LER, LWR and PSD. We also present, discuss and analyze the phenomenon of “spatial ergodicity” and its effect on proper sampling of edge measurements for stochastic model calibration.

Conference Presentation

Citation Download Citation

Azat Latypov, Chih-I Wei, Peter De Bisschop, Gurdaman Khaira, and Germain Fenger "Calibration of Gaussian random field stochastic EUV models", Proc. SPIE 12051, Optical and EUV Nanolithography XXXV, 1205105 (26 May 2022); https://doi.org/10.1117/12.2614142

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available