Simulation of a discharge produced plasma (DPP) for Blue-X (6.x nm) EUV radiation

D. B. Reisman; K. Saito; W. A. Neff

doi:10.1117/12.2628996

26 May 2022 Simulation of a discharge produced plasma (DPP) for Blue-X (6.x nm) EUV radiation

D. B. Reisman, K. Saito, W. A. Neff

Proceedings Volume 12051, Optical and EUV Nanolithography XXXV; 120510U (2022) https://doi.org/10.1117/12.2628996
Event: SPIE Advanced Lithography + Patterning, 2022, San Jose, California, United States

Conference Poster

Abstract

The EQ-10 Electrodeless Z-pinchTM source uses Xenon plasma to produce 13.5 nm (±1% BW) radiation. The source is used for metrology, mask inspection, and resist development. In this talk we will present modeling of the EQ-10 Z-pinch using the Trac-II radiation magnetohydrodynamic (RMHD) code. Specifically, we use RMHD calculations to explore development of the Electrodeless Z-pinch as a source of Blue-X (6.x nm) radiation. Critical to this study are the nonLTE effects on radiation physics and the equation of state. For this we rely on the FLYCHK collisional-radiative model to determine the radiative power loss. We also use the FLYCHK calculated emissivity to estimate the Blue-X power output. We revisit previous experimental attempts at obtaining Blue-X EUV radiation with neon gas. Having established a baseline of performance on our present Z-pinch system, we use RMHD calculations to scale to higher outputs of potential interest to the EUV community.

Citation Download Citation

D. B. Reisman, K. Saito, and W. A. Neff "Simulation of a discharge produced plasma (DPP) for Blue-X (6.x nm) EUV radiation", Proc. SPIE 12051, Optical and EUV Nanolithography XXXV, 120510U (26 May 2022); https://doi.org/10.1117/12.2628996

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