Amorphous WO3 as transparent conductive oxide in the near-IR

Hao Chen; Alice Carlotto; Cristina Armellini; Marco Cassinelli; Mario Caironi; Mohamed Zaghloul; Alberto Tagliaferri; Alessandro Chiasera; Silvia M. Pietralunga

doi:10.1117/12.2626565

25 May 2022 Amorphous WO₃ as transparent conductive oxide in the near-IR

Hao Chen, Alice Carlotto, Cristina Armellini, Marco Cassinelli, Mario Caironi, Mohamed Zaghloul, Alberto Tagliaferri, Alessandro Chiasera, Silvia M. Pietralunga

Author Affiliations +

Proceedings Volume 12142, Fiber Lasers and Glass Photonics: Materials through Applications III; 121421J (2022) https://doi.org/10.1117/12.2626565
Event: SPIE Photonics Europe, 2022, Strasbourg, France

Conference Poster

Abstract

The demand for transparent conductive films (TCFs) is dramatically increasing. In this work tungsten oxide (WO_3-x) is studied as a possible option additional to the existed TCFs. We introduce WO_3-x thin films fabricated by a non-reactive magnetron RF-sputtering process at room temperature, followed by thermal annealing in dry air. Films are characterized morphologically, structurally, electrically, optically, and dielectrically. Amorphous WO_3-x thin films are shown to be n-type conductive while the transparency extends to the near-IR. By evaluating a figure of merit for transparent-conductive performance and comparing to some most-widely used TCFs, WO_3-x turns out to outperform in the near-IR optical range

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Hao Chen, Alice Carlotto, Cristina Armellini, Marco Cassinelli, Mario Caironi, Mohamed Zaghloul, Alberto Tagliaferri, Alessandro Chiasera, and Silvia M. Pietralunga "Amorphous WO₃ as transparent conductive oxide in the near-IR", Proc. SPIE 12142, Fiber Lasers and Glass Photonics: Materials through Applications III, 121421J (25 May 2022); https://doi.org/10.1117/12.2626565

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