High-brightness LDP source for EUVL mask inspection

Kazuya Aoki; Yoshihiko Sato; Yusuke Teramoto; Takahiro Shirai; Shunichi Morimoto; Hidenori Watanabe; Akihisa Nagano; Daisuke Yajima; Noritaka Ashizawa

doi:10.1117/12.2642210

15 September 2022 High-brightness LDP source for EUVL mask inspection

Kazuya Aoki, Yoshihiko Sato, Yusuke Teramoto, Takahiro Shirai, Shunichi Morimoto, Hidenori Watanabe, Akihisa Nagano, Daisuke Yajima, Noritaka Ashizawa

Author Affiliations +

Proceedings Volume 12325, Photomask Japan 2022: XXVIII Symposium on Photomask and Next-Generation Lithography Mask Technology; 123250I (2022) https://doi.org/10.1117/12.2642210
Event: Photomask Japan 2022, 2022, Online Only

Abstract

The Laser-assisted Discharge-produced Plasma (LDP) EUV source has been developed as a light source for actinic mask inspection and beamline application and deployed in the field. LDP EUV source enables to generate high brightness with relatively larger EUV plasma by discharged plasma triggered by laser on one electrode disc which is coated by tin film. As EUVL process is used more in mass-production process, the requirement for EUV source for mask inspection is required more. USHIO LDP source has overcome various issues specialized from LDP source and realized high reliability 24/7 based operation with high brightness maintained. In this session, the following items will be presented. (1) LDP EUV source configuration and operation sequence. (2) LDP EUV source key performance (3) Reliability improvement items. (4) High Brightness Development

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Kazuya Aoki, Yoshihiko Sato, Yusuke Teramoto, Takahiro Shirai, Shunichi Morimoto, Hidenori Watanabe, Akihisa Nagano, Daisuke Yajima, and Noritaka Ashizawa "High-brightness LDP source for EUVL mask inspection", Proc. SPIE 12325, Photomask Japan 2022: XXVIII Symposium on Photomask and Next-Generation Lithography Mask Technology, 123250I (15 September 2022); https://doi.org/10.1117/12.2642210

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KEYWORDS

Extreme ultraviolet

Plasma

Inspection

Extreme ultraviolet lithography

Ions

Photomasks

Tin

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