Complex amplitude measurement with off-axis and phase-shifting methods for characterizing and evaluating metasurfaces

Teruyoshi Nobukawa; Ryo Higashida; Kei Hagiwara

doi:10.1117/12.2677796

4 October 2023 Complex amplitude measurement with off-axis and phase-shifting methods for characterizing and evaluating metasurfaces

Teruyoshi Nobukawa, Ryo Higashida, Kei Hagiwara

Author Affiliations +

Proceedings Volume 12684, ODS 2023: Industrial Optical Devices and Systems; 126840D (2023) https://doi.org/10.1117/12.2677796
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States

Abstract

An interferometer with off-axis and phase-shifting methods is developed to quantitatively measure complex amplitude distributions of fabricated metasurfaces. The developed interferometer switches between the off-axis and phase-shifting methods depending on the maximum spatial frequency components of a specimen metasurface. The off-axis method allows complex amplitude measurements from a single interference pattern and is robust to environmental vibrations, whereas the phase-shifting method can achieve high spatial resolutions via sequential recording of multiple interference patterns. We measured the complex amplitude distribution of fabricated metasurfaces using the developed interferometer. This interferometer would be useful for reducing design and fabrication errors and optimizing metasurface structures.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Teruyoshi Nobukawa, Ryo Higashida, and Kei Hagiwara "Complex amplitude measurement with off-axis and phase-shifting methods for characterizing and evaluating metasurfaces", Proc. SPIE 12684, ODS 2023: Industrial Optical Devices and Systems, 126840D (4 October 2023); https://doi.org/10.1117/12.2677796

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