Paper
16 October 2023 Mode-localized temperature sensor with ultrahigh sensitivity
Hao Kang, Jianjun Su
Author Affiliations +
Proceedings Volume 12803, Fifth International Conference on Artificial Intelligence and Computer Science (AICS 2023); 128031W (2023) https://doi.org/10.1117/12.3009249
Event: 2023 5th International Conference on Artificial Intelligence and Computer Science (AICS 2023), 2023, Wuhan, China
Abstract
In order to significantly improve the performance of resonant temperature sensor the mode localization phenomenon is first applied to the resonant temperature sensor and a resonate temperature sensor composed of 2-DoF (degree-of-freedom) resonator is proposed in this paper. The sensing scheme and 2-DoF resonator of the sensor were analyzed theoretically. The temperature response and model shape were analyzed by finite software. The simulation results showed the AR (amplitude ratio) based sensitivity was enhanced by four orders of magnitude compared with the frequency-based sensitivity.
(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.
Hao Kang and Jianjun Su "Mode-localized temperature sensor with ultrahigh sensitivity", Proc. SPIE 12803, Fifth International Conference on Artificial Intelligence and Computer Science (AICS 2023), 128031W (16 October 2023); https://doi.org/10.1117/12.3009249
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KEYWORDS
Resonators

Temperature sensors

Sensors

Temperature metrology

Autoregressive models

Microelectromechanical systems

Quartz

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