Vectorial micro scanning mirror for fast beam positioning of a compact medical therapy laser

Thilo Sandner; Thomas Graßhoff; Markus Schwarzenberg; Klemens Birnbaum; Tino Pügner; Jan Grahmann

doi:10.1117/12.3007365

12 March 2024 Vectorial micro scanning mirror for fast beam positioning of a compact medical therapy laser

Thilo Sandner, Thomas Graßhoff, Markus Schwarzenberg, Klemens Birnbaum, Tino Pügner, Jan Grahmann

Proceedings Volume 12899, MOEMS and Miniaturized Systems XXIII; 128990R (2024) https://doi.org/10.1117/12.3007365
Event: SPIE OPTO, 2024, San Francisco, California, United States

Conference Poster

Abstract

Miniaturized vectorial beam steering mirrors are required in numerous applications like (i) LIDAR, (ii) diagnostic imaging or (iii) miniaturized therapeutic laser systems. In this article we present a new type of electrostatically driven vectorial (2D quasi-static) MEMS scanning mirror with monolithic integrated position sensors. The vectorial MEMS scanner was specially optimized for the requirements of a compact therapeutic photocoagulation laser system for the treatment of retinal eye diseases. This requires a highly miniaturized MEMS scanning system for fast and precise vectorial beam positioning of the treatment laser with a positioning time of ≤ 5 ms. The quasi-static 2D drive of the presented 2D MEMS scanning mirror is based on electrostatic vertical comb actuators in combination with a noncardanic suspension of the 2.2 mm circular mirror plate. To measure and control the actual beam position piezoresistive position sensors are monolithically integrated into the MEMS design. The MEMS scanner was designed for a quasistatic (mechanical) 2D tilt angle of ± 2 ° for both scan axes each in two frequency variants with 714 Hz and 1 kHz at 70 V and 130 V drive voltage, respectively. For high laser powers of > 1.5 W (average power) at 519 nm wavelength, highly reflective optical coatings based on a symmetric HRC design of enhanced (hybrid) Al with R ≥ 98 % are used.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

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Thilo Sandner, Thomas Graßhoff, Markus Schwarzenberg, Klemens Birnbaum, Tino Pügner, and Jan Grahmann "Vectorial micro scanning mirror for fast beam positioning of a compact medical therapy laser", Proc. SPIE 12899, MOEMS and Miniaturized Systems XXIII, 128990R (12 March 2024); https://doi.org/10.1117/12.3007365

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